Silicon Micromachining

A work buddy and I were wondering how they make silicon hairsprings.

Segue to my desktop; I’m running tests and while they go, I’m reading “Horology” by Barry B. Kaplan, 2022, Shiffer Publishing Ltd., New York, and he outs it.

It’s a process called DRIE or Deep Reactive Ion Etching https://en.wikipedia.org/wiki/Deep_reactive-ion_etching where ions are accelerated in an ionized gas toward the subject and etch where not masked. Since they are accelerated toward the work by a…

Silicon Micromachining

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